6.777J/2.751J Material Property Database

 

Material: Pyrex Glass

 

Property

Value

Reference

Image/URL (optional)

Mass density

2.23 g/cm³

www.valleydesign.com/pr16.htm#7740

physics.nist.gov/cgi-bin/Star/compos.pl?matno=169

Young's modulus

67 GPa

http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/ AllDocumentsByDocIndex2/

http://mail.mems-exchange.org/pipermail/mems-talk/

Poisson ratio

0.2

http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/ AllDocumentsByDocIndex2/

http://mail.mems-exchange.org/pipermail/mems-talk/

Stiffness Constants

?

?

?

Fracture Toughness

0.77

--

http://65.108.128.37/pub/prodsvc/corning-pyrex-properties.php

Residual stress on silicon

 

 

 

Specific heat

750 J/kg-K

http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/ AllDocumentsByDocIndex2/

http://mail.mems-exchange.org/pipermail/mems-talk/

Thermal conductivity

1.143W/m-K

http://www.irmm.jrc.be/rm/physical.pdf

http://mail.mems-exchange.org/pipermail/mems-talk/

Dielectric constant

4.6 (1MHz, 20C)

http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/ AllDocumentsByDocIndex2/

http://mail.mems-exchange.org/pipermail/mems-talk/

Index of refraction

1.474 (Sodium D line)

http://www.bibby-sterilin.co.uk/internet/bibbysite.nsf/ AllDocumentsByDocIndex2/

http://mail.mems-exchange.org/pipermail/mems-talk/

Electrical resistivity

400 MΏ-m

Electric Resistance
The Physics Hypertextbook
© 1998-2004 by Glenn Elert

http://hypertextbook.com/physics/electricity/resistance/

Magnetic permeability

?

?

?

Piezoresistivity

--

--

--

Piezoelectricity

?

?

?

Wet etching method

TMAH

--

http://mintlab.snu.ac.kr/PaperArchive/2001_IC_10.pdf

Plasma etching method

SF6

X. Li, T. Abe and M. Esashi, “Deep reactive ion etching

of Pyrex glass using SF6 plasma,” Sensors and Actuators

A: Physical, vol. 87, no 3, pp. 139-145, 2001.

http://www.k-ids.or.kr/jid/paper/Jid_2-4/dsp12-3.pdf

Adhesion to silicon dioxide

Good

--

http://www.enee.umd.edu/class/enee605/grp/fg4_report.pdf

Biocompatibility

Good

Accelerated Testing Of Anodically Bonded Glass-Silicon Packages In Salt Water

M. R. Dokmeci, J. A. Von Arx and K. Najafi

Center for Integrated Sensors and Circuits

University of Michigan, Ann Arbor, MI 48109, USA

http://www.eecs.umich.edu/najafi/pdf/Paper_80.pdf

Hydrophobicity

Influence of surface wettability on friction and wear tests

Borruto, A. (Rome Univ., Italy); Crivellone, G.; Marani, F. Source: Wear, v 222, n 1,

Nov. 1998, p 57-65
ISSN: 0043-1648 CODEN: WEARCJ

http://www.engineeringvillage2.org/ohubservice/servlet

/OHUBService?ohubIDType=ip&reason=get&ISSN=0043-1648&firstPage=57&firstVolume=222&firstIssue=

1&DOCID=inspec_base906134328