6.777J/2.751J Material Property Database

 

Material:  PVD Titanium

 

Property

Value

Reference

Image/URL (optional)

Mass density

4.54 g/cc

 

http://www.iamaterials.com/

materials/titanium.htm

Young's modulus

110 GPa

IEEE,Micro Electro Mechanical Systems Workshop,Feb 1990, Napa Vally,California, p.174

 

Poisson ratio

.34

 

http://www.matweb.com/

search/SpecificMaterial.asp?bassnum=METi00

Stiffness Constants

Hardness: 81-143 kg/mm²

Plummer, Deal, Griffin.  Silicon VLSI Technology.  Prentice Hall, Upper Saddle River, NJ: 2000.

p. 697

 

Tensile strength

235 MPa

 

http://www.tsmd.com/

tsprod/tsp5ndt.htm

Residual stress on silicon

[dynes/cm²]

Xs=substrate thickness

Xf=film thickness

R=radius of curvature

Plummer, Deal, Griffin.  Silicon VLSI Technology.  Prentice Hall, Upper Saddle River, NJ: 2000.

p. 735

 

Specific heat

.523 J/gK

 

http://www.cm.utexas.edu/

bard/Titanium22.html

Thermal conductivity

.219 W/cmK

 

http://www.iamaterials.com/

materials/titanium.htm

Dielectric constant

-conductor-

 

 

Index of refraction

For λ=500nm,

n=1.78+2.39i

Weaver, J.H.  Optical properties of selected elements.  Handbook of Chemistry and Physics, 84th edition, 2003-2004.  p.20

http://www.hbcpnetbase.com/

Electrical conductivity

1.8e-6 mho/cm

 

http://www.matweb.com/

search/SpecificMaterial.asp?bassnum=METi00

Magnetic susceptibility

1.25e-6 cgs/g

 

http://www.matweb.com/

search/SpecificMaterial.asp?bassnum=METi00

Piezoresistivity

 

 

 

Piezoelectricity

-not an insulator-

 

 

Wet etching method

HF/Nitric Acid

 

http://www.mems-exchange.org/

catalog/P3164/

Plasma etching method

Chlorine, boron trichloride, nitrogen

 

http://www.mems-exchange.org/

catalog/P2131/

Adhesion to silicon dioxide

Very good- used to adhere other metals to oxide.  Failiure at 500 ºC – forms TiSi2

Plummer, Deal, Griffin.  Silicon VLSI Technology.  Prentice Hall, Upper Saddle River, NJ: 2000.  p. 694

 

Biocompatibility

“..titanium, perhaps the most biocompatible material known..”

Buddy D. Ratner, PhD

Journal of Rehabilitation Research and Development
Vol. 39 No. 3, (Supplement) May/June 2002
VA/NIH Prosthetics Roundtable
Pages 1-2

http://www.vard.org/

jour/02/39/3/sup/Ratner.htm

Hydrophobicity

55º±5º

Ponsonnet, L. Relationship between surface properties (roughness, wettability) of titanium and titanium alloys and cell behaviour
 Source: Materials Science and Engineering C, v 23, n 4, Jun 10, 2003, p 551-560

 

Melting point

1660ºC

 

http://www.iamaterials.com/

materials/titanium.htm