Electron-beam lithography

Teaching self-assembling structures a new trickMIT researchers produce 3-D configurations that could lead to new microchips and other devices.

How to corner the MEMS marketGovernment investment in the manufacture of micromachines could pay huge dividends, but in the meantime, MIT researchers are developing new fabrication techniques.

Tiny stamps for tiny sensorsNew glass stamp may make cheaper, more precise biosensors.

Building chips from collapsing nanopillarsBy turning a common problem in chip manufacture into an advantage, MIT researchers produce structures only 30 atoms wide.

The future of chip manufacturingMIT researchers show how to make e-beam lithography, commonly used to prototype computer chips, more practical as a mass-production technique.